Title:
STAGE DEVICE AND CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/042897
Kind Code:
A1
Abstract:
The present invention relates to a charged particle beam device wherein a table deformation arising from the movement of a rolling element from a guide can be suppressed via a simple constitution. Provided in the sample stage containing a table (105) and a linear guide, which comprises a carriage (201), a rolling element, and a guide rail (202), is a distortion-insulating guide structure characterized by the connection between the carriage (201) and the table (105) being mediated by an adapter (401) that is an elastic deformable member. The invention also provides a stage using the guide structure and a charged particle beam device using the stage.
Inventors:
TAKAHASHI MOTOHIRO (JP)
MIZUOCHI MASAKI (JP)
NAKAGAWA SHUICHI (JP)
OGAWA HIRONORI (JP)
KATO TAKANORI (JP)
MIZUOCHI MASAKI (JP)
NAKAGAWA SHUICHI (JP)
OGAWA HIRONORI (JP)
KATO TAKANORI (JP)
Application Number:
PCT/JP2017/025365
Publication Date:
March 08, 2018
Filing Date:
July 12, 2017
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/20; B23Q1/72; G12B5/00
Foreign References:
| JP2008229811A | 2008-10-02 | |||
| JP2006112458A | 2006-04-27 | |||
| JP2004176825A | 2004-06-24 | |||
| JP2000179548A | 2000-06-27 | |||
| JPH02229914A | 1990-09-12 | |||
| JPH0251092A | 1990-02-21 | |||
| JPS62188636A | 1987-08-18 |
Attorney, Agent or Firm:
POLAIRE I.P.C. (JP)
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