Title:
STAGE DEVICE AND CONTROL METHOD FOR STAGE DEVICE
Document Type and Number:
WIPO Patent Application WO/2012/169505
Kind Code:
A1
Abstract:
In the present invention, a stage device is controlled as follows: a marker that allows measurement of position and orientation is provided on a sample, a sample holder, or a rotating table; a stage is rotated and translated in accordance with a given movement pattern; the position and orientation of the marker are then measured; the results of said measurement are used to identify the position of the center of rotation of the rotating table; a table of correction amounts with respect to rotation angle is created by determining rotation-angle correction amounts, which correct rotational error, and translation correction amounts, which correct variation in the position of the aforementioned center of rotation; correction amounts corresponding to an inputted rotation-angle command value or an actual rotation angle are acquired from the aforementioned table; and inputted rotation and translation command values or a detected rotation angle and translation position are corrected.
Inventors:
MOMOI YASUYUKI (JP)
TAKAHASHI KANAME (JP)
HANEDA SHIGERU (JP)
TAKAHASHI KANAME (JP)
HANEDA SHIGERU (JP)
Application Number:
PCT/JP2012/064504
Publication Date:
December 13, 2012
Filing Date:
June 06, 2012
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
MOMOI YASUYUKI (JP)
TAKAHASHI KANAME (JP)
HANEDA SHIGERU (JP)
MOMOI YASUYUKI (JP)
TAKAHASHI KANAME (JP)
HANEDA SHIGERU (JP)
International Classes:
H01J37/20; H01J37/22; H01L21/68
Domestic Patent References:
| WO2010047378A1 | 2010-04-29 | |||
| WO2010001790A1 | 2010-01-07 | |||
| WO2006082714A1 | 2006-08-10 | |||
| WO2006121108A1 | 2006-11-16 |
Foreign References:
| JP2005100676A | 2005-04-14 |
Attorney, Agent or Firm:
ISONO Michizo (JP)
Michizo Isono (JP)
Michizo Isono (JP)
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Claims: