Title:
STAGE DEVICE AND EXPOSURE SYSTEM
Document Type and Number:
WIPO Patent Application WO/2006/013856
Kind Code:
A1
Abstract:
The position of a moving stage is detected without increasing the costs and size of the device. The device comprising a moving stages (WST, MST) moving on a moving surface (12a), and a position detecting device for detecting the positions of the moving stages (WST, MST) by means of beams (B1-B3). The device further comprising drive devices (82, 84) for driving the moving stages (WST, MST), tracking optical members (30-33) provided on the drive devices (82, 84) to allow the beams (B1-B3) to keep track of the moving stages (WST, MST) according to the movement of the moving stages (WST, MST), and first optical members (34-39) provided on the moving stages (WST, MST) and coupled optically with the tracking optical members (30-33).
Inventors:
SHIBAZAKI YUICHI (JP)
OKUMURA MASAHIKO (JP)
HIDAKA YASUHIRO (JP)
OKUMURA MASAHIKO (JP)
HIDAKA YASUHIRO (JP)
Application Number:
PCT/JP2005/014115
Publication Date:
February 09, 2006
Filing Date:
August 02, 2005
Export Citation:
Assignee:
NIKON CORP (JP)
SHIBAZAKI YUICHI (JP)
OKUMURA MASAHIKO (JP)
HIDAKA YASUHIRO (JP)
SHIBAZAKI YUICHI (JP)
OKUMURA MASAHIKO (JP)
HIDAKA YASUHIRO (JP)
International Classes:
H01L21/027; G01B11/00; G03F7/20; H01L21/68
Foreign References:
| JP2002319541A | 2002-10-31 | |||
| JP2003254739A | 2003-09-10 | |||
| JPH05217837A | 1993-08-27 | |||
| JP2001307983A | 2001-11-02 | |||
| JPH0822948A | 1996-01-23 |
Attorney, Agent or Firm:
Shiga, Masatake (Yaesu Chuo-k, Tokyo 53, JP)
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