Title:
STAGE DEVICE AND LINEAR ACTUATOR
Document Type and Number:
WIPO Patent Application WO/2017/212908
Kind Code:
A1
Abstract:
Provided is a stage device capable of reducing subtle movements in the stage position (observation position) when switching between an automatic mode and a manual mode. The stage device includes: a first stage; a second stage that relatively moves in a first direction on the first stage; a first driving unit that drives a first part to be driven for moving the second stage relatively in the first direction using a manual driving force; and a second driving unit that drives a second part to be driven for moving the second stage relatively in the first direction using an electrical driving force. Here, at least a part of the first part to be driven and at least a part of the second part to be driven have a common operation axis.
Inventors:
SAKATA TSUGUHIDE (JP)
ANDO MASAHIRO (JP)
KOBAYASHI HIROKI (JP)
OKAMOTO TAKUJI (JP)
ANDO MASAHIRO (JP)
KOBAYASHI HIROKI (JP)
OKAMOTO TAKUJI (JP)
Application Number:
PCT/JP2017/019127
Publication Date:
December 14, 2017
Filing Date:
May 23, 2017
Export Citation:
Assignee:
CANON KK (JP)
CANON PRECISION INC (JP)
CANON PRECISION INC (JP)
International Classes:
G02B21/26
Domestic Patent References:
| WO2014069190A1 | 2014-05-08 |
Foreign References:
| JP2013160960A | 2013-08-19 | |||
| JP2006178204A | 2006-07-06 | |||
| JP2016200803A | 2016-12-01 |
Attorney, Agent or Firm:
OHTSUKA, Yasunori et al. (JP)
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