Title:
STAGE DEVICE
Document Type and Number:
WIPO Patent Application WO/2007/105455
Kind Code:
A1
Abstract:
A stage device that can be divided so that it is transportable by land and that can
appropriately process a substrate. The stage device has a substrate supporting
surface for supporting the substrate (W) to be processed, a pair of guide frames
(13X) disposed facing each other across the substrate supporting surface, a
gantry (13Y) installed so as to straddle the pair of guide frames (13X) and movably
supported on the pair of guide frames (13X), and a substrate processing unit (14)
installed on the gantry (13Y). The guide frame (13X) is a joined body of a main frame
part (15A) and a sub-frame part (15B). The main frame part (15A) forms a movement
route (working area R1) of the gantry (13Y) which route is required for the processing
of the substrate by the substrate processing unit (14). The sub-frame part (15B)
is connected to one end or both ends in the longitudinal direction of the main frame
part (15A) and forms the movement route of the gantry (13Y) up to the non-working
position (non-working area (R2)).
Inventors:
TANAKA, Yasuzou (Inc. 2500 Hagisono, Chigasaki-sh, Kanagawa 43, 2538543, JP)
田中 保三 (〒43 神奈川県茅ヶ崎市萩園２５００番地 株式会社アルバック内 Kanagawa, 2538543, JP)
YUYAMA, Junpei (Inc. 2500 Hagisono, Chigasaki-sh, Kanagawa 43, 2538543, JP)
湯山 純平 (〒43 神奈川県茅ヶ崎市萩園２５００番地 株式会社アルバック内 Kanagawa, 2538543, JP)
田中 保三 (〒43 神奈川県茅ヶ崎市萩園２５００番地 株式会社アルバック内 Kanagawa, 2538543, JP)
YUYAMA, Junpei (Inc. 2500 Hagisono, Chigasaki-sh, Kanagawa 43, 2538543, JP)
湯山 純平 (〒43 神奈川県茅ヶ崎市萩園２５００番地 株式会社アルバック内 Kanagawa, 2538543, JP)
Application Number:
JP2007/053354
Publication Date:
September 20, 2007
Filing Date:
February 23, 2007
Export Citation:
Assignee:
ULVAC, INC. (2500 Hagisono, Chigasaki-shi Kanagawa, 43, 2538543, JP)
株式会社アルバック (〒43 神奈川県茅ヶ崎市萩園２５００番地 Kanagawa, 2538543, JP)
TANAKA, Yasuzou (Inc. 2500 Hagisono, Chigasaki-sh, Kanagawa 43, 2538543, JP)
田中 保三 (〒43 神奈川県茅ヶ崎市萩園２５００番地 株式会社アルバック内 Kanagawa, 2538543, JP)
YUYAMA, Junpei (Inc. 2500 Hagisono, Chigasaki-sh, Kanagawa 43, 2538543, JP)
株式会社アルバック (〒43 神奈川県茅ヶ崎市萩園２５００番地 Kanagawa, 2538543, JP)
TANAKA, Yasuzou (Inc. 2500 Hagisono, Chigasaki-sh, Kanagawa 43, 2538543, JP)
田中 保三 (〒43 神奈川県茅ヶ崎市萩園２５００番地 株式会社アルバック内 Kanagawa, 2538543, JP)
YUYAMA, Junpei (Inc. 2500 Hagisono, Chigasaki-sh, Kanagawa 43, 2538543, JP)
International Classes:
H01L21/68; B23Q1/01
Attorney, Agent or Firm:
IISAKA, Yasuo (Utoku-building, 6-85 Benten-dori, Naka-k, Yokohama-shi Kanagawa 07, 2310007, JP)
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