Title:
STAGE DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/104806
Kind Code:
A1
Abstract:
Disclosed is a stage device which has no risk of air ductwork rupturing due to bending accompanying the movement of the stage. The stage device, which is used in a vacuum, has: a gas supply unit that generates a gas; a base member that has the four surfaces of a top, bottom, left, and right surface; a slider that has surfaces facing each surface of the base member and that forms a frame shape disposed movably enclosing the base member; and an air bearing that supplies gas between the base member and the slider, causing the slider to float. The slider has an air chamber that stores air and that is on a surface facing the base member, and the inside of the base member is provided with a slider movement air duct that is for supplying gas between an inlet that causes the gas generated by the gas supply unit to flow in and an outlet for supplying the gas to the air chamber of the slider.
Inventors:
OAE, Yoshihisa (32-1 Asahi-cho 1-chome, Nerima-k, Tokyo 71, 〒1790071, JP)
大饗 義久 (〒71 東京都練馬区旭町１丁目３２番１号 株式会社アドバンテスト内 Tokyo, 〒1790071, JP)
大饗 義久 (〒71 東京都練馬区旭町１丁目３２番１号 株式会社アドバンテスト内 Tokyo, 〒1790071, JP)
Application Number:
JP2010/052681
Publication Date:
September 01, 2011
Filing Date:
February 23, 2010
Export Citation:
Assignee:
ADVANTEST CORPORATION (32-1, Asahi-cho 1-chome Nerima-k, Tokyo 71, 〒1790071, JP)
株式会社アドバンテスト (〒71 東京都練馬区旭町１丁目３２番１号 Tokyo, 〒1790071, JP)
OAE, Yoshihisa (32-1 Asahi-cho 1-chome, Nerima-k, Tokyo 71, 〒1790071, JP)
株式会社アドバンテスト (〒71 東京都練馬区旭町１丁目３２番１号 Tokyo, 〒1790071, JP)
OAE, Yoshihisa (32-1 Asahi-cho 1-chome, Nerima-k, Tokyo 71, 〒1790071, JP)
International Classes:
H01L21/027; F16C32/06; G03F7/20
Attorney, Agent or Firm:
OKAMOTO, Keizo (OKAMOTO PATENT OFFICE Yamanishi Bldg, 4F 11-7, Nihonbashi Ningyo-cho 3-chome, Chuo-k, Tokyo 13, 〒1030013, JP)
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Claims: