Title:
STAGE DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/044685
Kind Code:
A1
Abstract:
A stage device 100 comprises: a slider 10 for air-servo driving; a first guide 12 that guides first-direction movement of the slider 10; an actuator 14 that drives the first guide 12 in a second direction; and a second guide 16 that guides the second-direction movement of the first guide 12.
Inventors:
YOSHIDA TATSUYA (JP)
Application Number:
PCT/JP2019/020883
Publication Date:
March 05, 2020
Filing Date:
May 27, 2019
Export Citation:
Assignee:
SUMITOMO HEAVY INDUSTRIES (JP)
International Classes:
G12B5/00; B23Q1/62; B23Q5/26; F16C32/06; H01L21/68; F16C33/74
Foreign References:
| JP2004119426A | 2004-04-15 | |||
| JP2002110523A | 2002-04-12 | |||
| JP2004319902A | 2004-11-11 |
Attorney, Agent or Firm:
MORISHITA Sakaki (JP)
Download PDF:
Previous Patent: SADDLE-TYPE VEHICLE
Next Patent: INFORMATION PROCESSING METHOD, PROGRAM, AND INFORMATION PROCESSING DEVICE
Next Patent: INFORMATION PROCESSING METHOD, PROGRAM, AND INFORMATION PROCESSING DEVICE