Title:
STAGE MECHANISM
Document Type and Number:
WIPO Patent Application WO/2011/152109
Kind Code:
A1
Abstract:
Provided is a stage mechanism having a small size and a simple structure. Only a moving stage of the stage mechanism slides, and the moving stage slides in an easy and stabile manner. The stage mechanism has little backlash when the moving stage is fixed and little movement after the moving stage is fixed. The stage mechanism comprises a fixed stage and the moving stage which slides along the surface of the fixed stage. A feed screw and one or more backlash absorbing members are disposed in a countersink part formed in the fixed stage, and a linking member for sliding the moving stage synchronously with the feeding of the feed screw is also disposed in the countersink part.
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Inventors:
NAKATOMI Yoshiharu (18-11, Misawa 5-chome Hino-sh, Tokyo 32, 〒1910032, JP)
Application Number:
JP2011/057728
Publication Date:
December 08, 2011
Filing Date:
March 29, 2011
Export Citation:
Assignee:
NAKATOMI Yoshiharu (18-11, Misawa 5-chome Hino-sh, Tokyo 32, 〒1910032, JP)
International Classes:
G12B5/00; B23Q1/28; B23Q1/58
Attorney, Agent or Firm:
EMORI Kenji (Excel Shinjuku-Gyoen Building 5F, 11-3, Shinjuku 1-chome, Shinjuku-k, Tokyo 22, 〒1600022, JP)
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Claims:
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