STAGE POSITIONING DEVICE

Title:

STAGE POSITIONING DEVICE

Document Type and Number:

WIPO Patent Application WO/1999/027540

Kind Code:

A1

Abstract:

A stage positioning device enabling a fine and stable positioning operation, comprising a stage (11) on which a sample (W) to which a beam (B) is applied, is placed, actuators (12a, 12b, 12c and 12d) which support the stage (11) in a noncontact and levitated state and control its movement, a first sensor (13) which measures relative displacement between the stage (11) and actuators (12a, 12b, 12c and 12d), a second sensor (36) which measures a relative displacement between an actual beam (B) application position and a target beam application position on the sample and a controller (15) which controls the movement of the stage so as to reduce the relative displacement detected by the sensor (36), wherein the stage is a magnetically levitated stage consisting of a levitation unit which has a table part on which the sample is placed and side plates hanging down from the outer circumference of the table part and a fixed unit which has the actuators which supports the levitation unit with the magnetic forces of magnets and, at the same time, controls the position of the levitation unit, and the fixed unit is covered with the table part and side plates of the levitation unit.

More Like This:

JPS63167206	DETECTOR FOR WELD LINE OF ARC WELDING
JP4921709	Chain or belt drive vehicle chassis geometry control method and control device
JP3035370	DISTANCE MEASUREMENT DEVICE

Inventors:

WATANABE KATSUHIDE (JP)
SATOH ICHIJU (JP)
HAGA TAKAHIDE (JP)
JOUNO YOSHINORI (JP)

Application Number:

PCT/JP1998/005274

Publication Date:

June 03, 1999

Filing Date:

November 24, 1998

Export Citation:

Click for automatic bibliography generation Help

Assignee:

EBARA CORP (JP)
WATANABE KATSUHIDE (JP)
SATOH ICHIJU (JP)
HAGA TAKAHIDE (JP)
JOUNO YOSHINORI (JP)

International Classes:

G01B11/00; G03B27/42; G03F7/20; G12B5/00; H02K7/09; (IPC1-7): G12B5/00

Foreign References:

JPH0454489A	1992-02-21
JPH01125932A	1989-05-18
JPH08233964A	1996-09-13

Other References: