Title:
STAINLESS STEEL MEMBER AND PRODUCTION METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2019/167885
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a stainless steel member and a production method thereof, said stainless steel member having a passivation layer formed on a surface of a base material formed from stainless steel, wherein the film thickness of the passivation layer is 2-20 nm, and the concentration of chromium atoms in the outermost surface of the passivation layer is 0.1-2.3 by atomic percentage. Also provided are a device or container, the liquid-contact part of which in contact with a semiconductor treatment liquid is formed from the stainless steel member, a semiconductor treatment liquid production method for producing the semiconductor treatment liquid by using the device, and a semiconductor treatment liquid storage method for storing the semiconductor treatment liquid in the container.
Inventors:
SERA AKIRA (JP)
NAKATANI MICHIHITO (JP)
NAKAMURA YUMIKO (JP)
NAKATANI MICHIHITO (JP)
NAKAMURA YUMIKO (JP)
Application Number:
PCT/JP2019/007054
Publication Date:
September 06, 2019
Filing Date:
February 25, 2019
Export Citation:
Assignee:
TOKUYAMA CORP (JP)
International Classes:
C23C22/50; C23G1/08; C25F3/24
Foreign References:
| JP2006045659A | 2006-02-16 | |||
| JPH08269681A | 1996-10-15 | |||
| JPH06172934A | 1994-06-21 |
Attorney, Agent or Firm:
KATO Ryuta et al. (JP)
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