Title:
STANDARD MEMBER FOR CORRECTION, SCANNING ELECTRON MICROSCOPE USING SAME, AND SCANNING ELECTRON MICROSCOPE CORRECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2010/016211
Kind Code:
A1
Abstract:
Disclosed is a standard specimen, used with an electron microscope to correct the magnification with high precision. A standard member used for correction corrects a scanning electron microscope that measures a pattern within an observation region based on information about the secondary electrons generated by scanning incident electron lines on the observation region on a measurement specimen, or information about the reflected electron intensity. The standard member has a first pattern region that corrects the magnification and that comprises a concavo-convex pattern (line/space pattern) in the cross section of a multilayer film that has been laminated, and a second pattern region near the first pattern at almost the same height that does not contain a pattern with the same periodicity as the pattern pitch size of the first region and that is used for beam adjustment.
Inventors:
NAKAYAMA, Yoshinori (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)
中山義則 (〒01 東京都国分寺市東恋ヶ窪一丁目２８０番地株式会社日立製作所中央研究所内 Tokyo, 〒1858601, JP)
SOHDA, Yasunari (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)
中山義則 (〒01 東京都国分寺市東恋ヶ窪一丁目２８０番地株式会社日立製作所中央研究所内 Tokyo, 〒1858601, JP)
SOHDA, Yasunari (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)
Application Number:
JP2009/003646
Publication Date:
February 11, 2010
Filing Date:
July 31, 2009
Export Citation:
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shinbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
NAKAYAMA, Yoshinori (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)
中山義則 (〒01 東京都国分寺市東恋ヶ窪一丁目２８０番地株式会社日立製作所中央研究所内 Tokyo, 〒1858601, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
NAKAYAMA, Yoshinori (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)
中山義則 (〒01 東京都国分寺市東恋ヶ窪一丁目２８０番地株式会社日立製作所中央研究所内 Tokyo, 〒1858601, JP)
International Classes:
G01B15/00; G01B3/30; H01J37/28
Attorney, Agent or Firm:
Polaire I.P.C. (7-1Hatchobori 2-chome, Chuo-ku Tokyo, 32, 〒1040032, JP)