Title:
STANDARD-MOISTURE GENERATOR, SYSTEM USING THE STANDARD-MOISTURE GENERATOR, METHOD FOR DETECTING ABNORMALITY IN STANDARD-MOISTURE AND COMPUTER PROGRAM PRODUCT FOR DETECTING THE ABNORMALITY
Document Type and Number:
WIPO Patent Application WO/2019/156255
Kind Code:
A1
Abstract:
A standard-moisture generator includes a flow controller configured to control a flow of a gas, a dryer connected to the flow controller, configured to absorb water molecules in the gas and to generate a dry gas having a background moisture, a moisture cell connected to the dryer, configured to add an object moisture to the dry gas, and a delay member connected to the moisture cell, configured to pass the dry gas with a delay time depending on a concentration of the background moisture in the dry gas.
Inventors:
TSUKAHARA YUSUKE (JP)
HIRAYAMA OSAMU (JP)
TAKEDA NOBUO (JP)
TSUJI TOSHIHIRO (JP)
YAMANAKA KAZUSHI (JP)
OIZUMI TORU (JP)
FUKUSHI HIDEYUKI (JP)
SATO NAGISA (JP)
AKAO SHINGO (JP)
OKANO TATSUHIRO (JP)
HIRAYAMA OSAMU (JP)
TAKEDA NOBUO (JP)
TSUJI TOSHIHIRO (JP)
YAMANAKA KAZUSHI (JP)
OIZUMI TORU (JP)
FUKUSHI HIDEYUKI (JP)
SATO NAGISA (JP)
AKAO SHINGO (JP)
OKANO TATSUHIRO (JP)
Application Number:
PCT/JP2019/004833
Publication Date:
August 15, 2019
Filing Date:
February 12, 2019
Export Citation:
Assignee:
BALL WAVE INC (JP)
International Classes:
G01N1/00; B01F23/10; G01N29/02
Foreign References:
| JPS5992841U | 1984-06-23 | |||
| JPS6011160A | 1985-01-21 | |||
| JP2008309550A | 2008-12-25 | |||
| JP2015004613A | 2015-01-08 | |||
| US3665748A | 1972-05-30 | |||
| US5294378A | 1994-03-15 | |||
| US4849174A | 1989-07-18 | |||
| JPH01221646A | 1989-09-05 | |||
| JPS6011160A | 1985-01-21 | |||
| JP2008309550A | 2008-12-25 | |||
| US6526803B1 | 2003-03-04 | |||
| JPS5992841U | 1984-06-23 |
Other References:
TOSHISHIRO, TSUJI ET AL.: "Moisture adsorption desorption characteristics of stainless steel tubing measured by ball surface acoustic wave trace moisture analyzer", JPN. J. APPL. PHYS, vol. 56, no. 7S1, 8 June 2017 (2017-06-08), XP055630913
TOSHISHIRO TSUJI ET AL.: "Moisture adsorption desorption characteristics of stainless steel tubing measured by ball surface acoustic wave trace moisture analyzer", JAPANESE JOURNAL OF APPLIED PHYSICS, vol. 56, no. 7S1, 8 June 2017 (2017-06-08)
N. TAKEDA ET AL., INT. J. THERMOPHYS., vol. 33, 2012, pages 1642
H. ABE ET AL., SENSORS AND ACTUATORS A: PHYSICAL, vol. 165, 2011, pages 230
H. ABE ET AL., SENSORS AND ACTUATORS A: PHYSICAL, vol. 128, 2006, pages 202
M. STEVENS ET AL., MEASUREMENT SCIENCE AND TECHNOLOGY, vol. 3, 1992, pages 943
A. E. O'KEEFFE ET AL., ANAL. CHEM., vol. 38, 1966, pages 760
T. OHMI, MICROECLECTRON. ENG., vol. 10, 1991, pages 163
T. OHMI ET AL., J. VAC. SCI. TECHNOL., vol. 14, 1996, pages 2505
T. TSUJI ET AL., JAPANESE JOURNAL OF APPLIED PHYSICS, vol. 56, no. 7S1, June 2017 (2017-06-01)
A. JAULMES ET AL., J. PHYS. CHEM., vol. 88, 1984, pages 5385
See also references of EP 3752814A4
TOSHISHIRO TSUJI ET AL.: "Moisture adsorption desorption characteristics of stainless steel tubing measured by ball surface acoustic wave trace moisture analyzer", JAPANESE JOURNAL OF APPLIED PHYSICS, vol. 56, no. 7S1, 8 June 2017 (2017-06-08)
N. TAKEDA ET AL., INT. J. THERMOPHYS., vol. 33, 2012, pages 1642
H. ABE ET AL., SENSORS AND ACTUATORS A: PHYSICAL, vol. 165, 2011, pages 230
H. ABE ET AL., SENSORS AND ACTUATORS A: PHYSICAL, vol. 128, 2006, pages 202
M. STEVENS ET AL., MEASUREMENT SCIENCE AND TECHNOLOGY, vol. 3, 1992, pages 943
A. E. O'KEEFFE ET AL., ANAL. CHEM., vol. 38, 1966, pages 760
T. OHMI, MICROECLECTRON. ENG., vol. 10, 1991, pages 163
T. OHMI ET AL., J. VAC. SCI. TECHNOL., vol. 14, 1996, pages 2505
T. TSUJI ET AL., JAPANESE JOURNAL OF APPLIED PHYSICS, vol. 56, no. 7S1, June 2017 (2017-06-01)
A. JAULMES ET AL., J. PHYS. CHEM., vol. 88, 1984, pages 5385
See also references of EP 3752814A4
Attorney, Agent or Firm:
SUZUKI Sohbe (JP)
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