Title:
STANDING WAVE EXCITATION TYPE ELECTROMAGNETIC DISCHARGE LAMP
Document Type and Number:
WIPO Patent Application WO/2022/224703
Kind Code:
A1
Abstract:
A discharge lamp 1 that discharges and emits light by electromagnetic wave power supplied by an electromagnetic wave oscillator comprises: a double discharge tube 10 having an inner tube 12 that is a dielectric body formed in a cylindrical shape with an open base portion and a closed tip portion, an inner conductor 13 that is a conductor inserted into the inner tube 12 and extending in the tube axis direction of the inner tube 12, an outer tube 11 that is a dielectric body formed so as to define a sealed space in which the discharge gas is enclosed on the radially outer side of the inner tube 12, and an outer conductor 15 that is a conductor formed so as to cover the outer periphery of the outer tube 11; and an impedance matching section 16 that matches the impedance of the electromagnetic wave oscillator side and the impedance of the double discharge tube 10 so that the standing wave becomes dominant in the double discharge tube 10.
Inventors:
KANDO MASASHI (JP)
KRAL MARTIN (JP)
HUSARIK JAN (JP)
MARIUS GABRIEL BLAJAN (JP)
OKAJIMA HIROSHI (JP)
HIGO TATSUJI (JP)
KRAL MARTIN (JP)
HUSARIK JAN (JP)
MARIUS GABRIEL BLAJAN (JP)
OKAJIMA HIROSHI (JP)
HIGO TATSUJI (JP)
Application Number:
PCT/JP2022/014312
Publication Date:
October 27, 2022
Filing Date:
March 25, 2022
Export Citation:
Assignee:
TOKYO KEIKI INC (JP)
PLASMA APPLICATIONS CO LTD (JP)
PLASMA APPLICATIONS CO LTD (JP)
International Classes:
H01J65/00; H01J61/56; H01J65/04
Foreign References:
| JPH10269993A | 1998-10-09 | |||
| JPH113686A | 1999-01-06 |
Attorney, Agent or Firm:
INOUE, Masanori et al. (JP)
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