Title:
STATE DETECTION METHOD AND STATE DETECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/228515
Kind Code:
A1
Abstract:
In the present invention, reduction in accuracy of state detection for a target is suppressed even when there is a limit on a direction in which an image can be taken. A state detection method according to a technology disclosed in the present application comprises: a step for imaging, by an imaging unit, at least one imaging target related to processing of a substrate and outputting an image; a step for applying, to the image, a filter prepared in advance in accordance with the imaging target; and a step for detecting the state of the imaging target on the basis of the image to which the filter has been applied. A filter coefficient of the filter applied to the image is corrected on the basis of a positional relationship between the imaged imaging target and the imaging unit.
Inventors:
SHIMIZU SHINJI (JP)
Application Number:
PCT/JP2023/008737
Publication Date:
November 30, 2023
Filing Date:
March 08, 2023
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD (JP)
International Classes:
H01L21/304; H01L21/027; H01L21/306
Foreign References:
| JP2019102653A | 2019-06-24 | |||
| JP2020034355A | 2020-03-05 |
Attorney, Agent or Firm:
YOSHITAKE Hidetoshi et al. (JP)
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