Title:
STATIC PRESSURE GAS BEARING
Document Type and Number:
WIPO Patent Application WO/2016/158381
Kind Code:
A1
Abstract:
A static pressure gas bearing to be used in a vacuum environment is provided with a guide shaft and a tubular slider 20 that houses the guide shaft while being capable of moving in the axial direction. The slider 20 is configured by fastening multiple plate-shaped members 20A-20D. A film 24 obtained from a soft material with a smaller elastic modulus than the plate-shaped members is interposed between the bonding surfaces of the plate-shaped members.
Inventors:
YOSHIDA TATSUYA (JP)
SAKAKI KAZUTOSHI (JP)
SAKAKI KAZUTOSHI (JP)
Application Number:
PCT/JP2016/058132
Publication Date:
October 06, 2016
Filing Date:
March 15, 2016
Export Citation:
Assignee:
SUMITOMO HEAVY INDUSTRIES (JP)
International Classes:
F16C32/06
Foreign References:
| JPH0221328U | 1990-02-13 | |||
| JPH03242386A | 1991-10-29 | |||
| JPS62180114A | 1987-08-07 |
Other References:
See also references of EP 3279489A4
Attorney, Agent or Firm:
MORISHITA SAKAKI (JP)
Sakaki Morishita (JP)
Sakaki Morishita (JP)
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