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Title:
STATIONARY MEMBER AND VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2013/065440
Kind Code:
A1
Abstract:
Provided is a stationary member which promotes thermal radiation from the surface and thermal conduction to adjacent members; also provided is a vacuum pump containing this stationary member. In order to increase the heat radiation of a rotor unit, a surface-processing removal process is performed on a prescribed portion of a thread groove spacer to enable heat to escape efficiently from the thread groove spacer toward a base and a stationary blade spacer. More specifically, the surface processing at the contact portion between the base and the stationary blade spacer and the threaded groove spacer is removed. Furthermore, the construction is such that the surface-processing removal process and the finishing process are performed simultaneously.

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Inventors:
SAKAGUCHI YOSHIYUKI (JP)
OKUDERA SATOSHI (JP)
Application Number:
PCT/JP2012/075616
Publication Date:
May 10, 2013
Filing Date:
October 03, 2012
Export Citation:
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Assignee:
EDWARDS JAPAN LTD (JP)
SAKAGUCHI YOSHIYUKI (JP)
OKUDERA SATOSHI (JP)
International Classes:
F04D19/04
Foreign References:
JPH10122179A1998-05-12
JP2010112202A2010-05-20
JP2000064986A2000-03-03
JPH08145307A1996-06-07
JPH0730395U1995-06-06
JP2005320905A2005-11-17
JP3098139B22000-10-16
Other References:
See also references of EP 2775148A4
Attorney, Agent or Firm:
NAKANO Hitoshi et al. (JP)
Hitoshi Nakano (JP)
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Claims: