Title:
STEEL CYLINDER FOR STORING ELECTRONIC-GRADE NITRIC OXIDE AND PROCESSING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2023/123595
Kind Code:
A1
Abstract:
A steel cylinder used for storing electronic-grade nitric oxide, the steel cylinder comprising a steel cylinder body (1); a passivation layer (2) is arranged on an inner wall of the steel cylinder body (1); a boriding area (3) is distributed in a dotted shape on the surface of the passivation layer (2); an aluminum film (4) is further arranged on the surface of the passivation layer (2); and a silicon dioxide thin film (5) is deposited outside the aluminum film (4). Multiple layers of structures are deposited in sequence on the surface of the inner wall of the steel cylinder, so that the roughness of the inner wall of the steel cylinder is greatly reduced, and impurities thus cannot attach to the inner wall of the steel cylinder to pollute electronic-grade gas stored in the steel cylinder. The inner wall of the steel cylinder is chemically inert, the electronic-grade gas can be stored for a long time, and the purity and quality of the electronic-grade gas are ensured. In addition, the bonding strength between the aluminum film on the inner wall of the steel cylinder and the silicon dioxide thin film and base body is high, which can prevent the aluminum film from being stripped from the base body during use, thus preventing the shortening of the service life of the steel cylinder.
Inventors:
ZHAO YI (CN)
PEI KAI (CN)
JIAO ZHONGPENG (CN)
SHI YINI (CN)
PEI KAI (CN)
JIAO ZHONGPENG (CN)
SHI YINI (CN)
Application Number:
PCT/CN2022/074046
Publication Date:
July 06, 2023
Filing Date:
January 26, 2022
Export Citation:
Assignee:
DALIAN CREDITCHEM ELECTRONIC MATERICAL CO LTD (CN)
International Classes:
F17C1/10; C23C8/00; C23C16/20
Foreign References:
| CN103008216A | 2013-04-03 | |||
| CN1274019A | 2000-11-22 | |||
| CN111041403A | 2020-04-21 | |||
| CN213117460U | 2021-05-04 | |||
| CN111321372A | 2020-06-23 | |||
| FR2444560A1 | 1980-07-18 | |||
| JP2001123299A | 2001-05-08 | |||
| EP0487438A1 | 1992-05-27 |
Attorney, Agent or Firm:
ZHEJIANG KG IP LAW FIRM (CN)
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