Title:
STEP FUNCTION DETERMINATION OF AUGER PEAK INTENSITY
Document Type and Number:
WIPO Patent Application WO2002069363
Kind Code:
A3
Abstract:
An electron analyzer and its method of operation useful for determining the intensity of a peak in the electron spectrum. The invention is particularly useful for determining the intensity of an Auger peak of a given element in the sample being probed and associating the intensity with a concentration of that element in the sample. The electron spectrum is measured above and below the anticipated peak. The data near the peak are not used. The remaining data above the peak and below the peak are fit to respective equations linearly dependent upon the measurement energy. The difference of the two equations at the value of the peak energy is associated with the peak intensity and the elemental concentration. The invention can be applied to measuring nitrogen concentration in a thin protective film of amorphous carbon or diamond.
Inventors:
KLYACHKO DIMITRI (US)
BORODYANSKY SERGEY (US)
VASILYEV LEONID (US)
BORODYANSKY SERGEY (US)
VASILYEV LEONID (US)
Application Number:
PCT/US2002/005703
Publication Date:
October 24, 2002
Filing Date:
February 25, 2002
Export Citation:
Assignee:
FEI CO (US)
KLYACHKO DIMITRI (US)
BORODYANSKY SERGEY (US)
VASILYEV LEONID (US)
KLYACHKO DIMITRI (US)
BORODYANSKY SERGEY (US)
VASILYEV LEONID (US)
International Classes:
G01N23/227; G01Q30/04; (IPC1-7): H01J49/44
Foreign References:
| US4034220A | 1977-07-05 |
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