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Title:
STOCKER PROVIDED WITH PURGING FUNCTIONALITY, STOCKER UNIT, AND METHOD FOR SUPPLYING CLEANING GAS
Document Type and Number:
WIPO Patent Application WO/2014/030421
Kind Code:
A1
Abstract:
Provided is a stocker capable of having cells provided with purging functionality and cells not provided with purging functionality co-exist, and capable of easily changing a cell not provided with purging functionality to a cell provided with purging functionality . The base of a stocker unit is mounted on a frame of a stocker, on which a plurality of shelf trays, arranged vertically or horizontally, not provided with a nozzle for supplying a cleaning gas can be mounted. The stocker unit comprises a pipe for supplying the cleaning gas provided along the base, and a plurality of shelf trays with purging functionality mounted on the base and arranged in the vertical or horizontal direction. The shelf tray is capable of supporting a container and is provided with a nozzle for supplying cleaning gas to the container from the pipe.

Inventors:
MURATA Masanao (Ise Plant, 100, Takegahana-cho, Ise-sh, Mie 05, 〒5160005, JP)
YAMAJI Takashi (Ise Plant, 100, Takegahana-cho, Ise-sh, Mie 05, 〒5160005, JP)
Application Number:
JP2013/067083
Publication Date:
February 27, 2014
Filing Date:
June 21, 2013
Export Citation:
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Assignee:
MURATA MACHINERY, LTD. (3 Minami Ochiai-cho, Kisshoin Minami-ku, Kyoto-sh, Kyoto 26, 〒6018326, JP)
International Classes:
B65G1/14; B65G1/00; H01L21/673
Domestic Patent References:
2008-09-04
Foreign References:
JP2008159734A2008-07-10
JP2010182747A2010-08-19
JPH11168135A1999-06-22
JPH11314703A1999-11-16
JP2000340641A2000-12-08
JP2010241515A2010-10-28
JP2010241515A2010-10-28
JP2010520625A2010-06-10
Attorney, Agent or Firm:
SHIOIRI Akira et al. (4-1-503, Narihira-cho Ashiya-sh, Hyogo 68, 〒6590068, JP)
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