Title:
STORAGE SHELF
Document Type and Number:
WIPO Patent Application WO/2019/239672
Kind Code:
A1
Abstract:
A storage shelf (1), provided with a body frame (10), and a shelf plate (20) attached to the body frame (10) with elastic bodies (9) interposed therebetween, the storage shelf (1) storing a FOUP containing a contained object, wherein the storage shelf (1) is provided with: a feed nozzle (31), which is provided to the shelf plate (20) and which feeds a gas to the FOUP; and a feed tube (33), having one end (33a) communicating to the feed nozzle (31) and the other end (33b) communicating with a main tube (50) connected to a feed source of the gas fed to the FOUP, the other end (33b) being supported by the body frame (10). The feed tube (33) has, at least partially between the one end (33a) and the other end (33b), a flexible part exhibiting flexibility.
Inventors:
TSUBAKI TATSUO (JP)
ONISHI SHINJI (JP)
ONISHI SHINJI (JP)
Application Number:
PCT/JP2019/012222
Publication Date:
December 19, 2019
Filing Date:
March 22, 2019
Export Citation:
Assignee:
MURATA MACHINERY LTD (JP)
International Classes:
H01L21/673; B65G1/14
Foreign References:
| JP2010182747A | 2010-08-19 | |||
| JP6061020B2 | 2017-01-18 | |||
| JP2016141565A | 2016-08-08 | |||
| JP2015126203A | 2015-07-06 | |||
| JP6061020B2 | 2017-01-18 |
Other References:
See also references of EP 3809454A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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