Title:
STRAIN RESISTANCE ELEMENT, PRESSURE SENSOR, STRAIN GAUGE, ACCELERATION SENSOR, AND ANGULAR VELOCITY SENSOR
Document Type and Number:
WIPO Patent Application WO/2017/022577
Kind Code:
A1
Abstract:
Provided is a strain resistance element having a large gauge factor and high detection sensitivity. The present invention is provided with: a substrate (an SOI substrate 5 including a Si substrate 1, a SiO2 layer 2, a surface Si film 3, and a SiO2 layer 4); and a strain resistance film 8 formed on a surface of the substrate, wherein the strain resistance film 8 is formed of a film of graphene or a transition metal dichalcogenide having a single-atom layer thickness or a multi-atom layer thickness. A pressure sensor, a strain gauge, an acceleration sensor, an angular velocity sensor, etc. can be manufactured by using the strain resistance element.
Inventors:
TORITA TAKESHI (JP)
YOSHII YOSHIHARU (JP)
NOMURA MASANOBU (JP)
NAKAGAWARA OSAMU (JP)
HIGAI SHINICHI (JP)
YOSHII YOSHIHARU (JP)
NOMURA MASANOBU (JP)
NAKAGAWARA OSAMU (JP)
HIGAI SHINICHI (JP)
Application Number:
PCT/JP2016/071924
Publication Date:
February 09, 2017
Filing Date:
July 26, 2016
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
G01L9/04; G01L1/18; G01P15/12
Domestic Patent References:
WO2014030534A1 | 2014-02-27 |
Foreign References:
US20150020610A1 | 2015-01-22 | |||
US20150034908A1 | 2015-02-05 |
Attorney, Agent or Firm:
KAWAMOTO, Takashi (JP)
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