Title:
STRAIN SENSOR
Document Type and Number:
WIPO Patent Application WO/2015/033522
Kind Code:
A1
Abstract:
In the present invention, a first strain sensor has: a support substrate having a stationary section; an oscillating beam connected to the stationary section; and a first arm and second arm connected to the oscillating beam. The first end of the first arm is connected to the first surface of the oscillating beam, the first arm is separated from the support substrate, the first end of the second arm is connected to the second surface of the oscillating beam, and the second arm is separated from the support substrate. Also, a second strain sensor has: an oscillating beam; a stationary section connected to the oscillating beam; a first arm of which the first end is connected to the first surface of the oscillating beam and the second end is a free end; and a second arm of which the first end is connected to the second surface of the oscillating beam and the second end is a free end.
Inventors:
IKEYAMA YOSHIMITSU
NAKANISHI TSUTOMU
KISO MASAYA
NAKANISHI TSUTOMU
KISO MASAYA
Application Number:
PCT/JP2014/004251
Publication Date:
March 12, 2015
Filing Date:
August 20, 2014
Export Citation:
Assignee:
PANASONIC IP MAN CO LTD (JP)
International Classes:
G01L1/10; G01B7/16
Foreign References:
| JP2006518846A | 2006-08-17 | |||
| JPH0763625A | 1995-03-10 | |||
| JP2012057999A | 2012-03-22 | |||
| JP2011164042A | 2011-08-25 |
Attorney, Agent or Firm:
FUJII, Kentaro et al. (JP)
Fujii Kentaro (JP)
Fujii Kentaro (JP)
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