Title:
STRAIN SENSORS BASED ON NANOWIRE PIEZORESISTOR WIRES AND ARRAYS
Document Type and Number:
WIPO Patent Application WO2005106417
Kind Code:
A3
Abstract:
A highly sensitive and ultra-high density array of electromechanical nanowires is fabricated. Nanowires are extremely sensitive to the strain induced by the attachment of biological and chemical species. Real-time detection is realized through piezoresistive transduction from the specially designed materials that form the nanowires. These specially designed materials include doped silicon or germanium, doped III-V semiconductors such as GaAs, GaN and InAs systems, and ultra-thin metal films.
Inventors:
TANG HONGXING (US)
ROUKES MICHAEL L (US)
ROUKES MICHAEL L (US)
Application Number:
PCT/US2004/039302
Publication Date:
May 11, 2006
Filing Date:
November 24, 2004
Export Citation:
Assignee:
CALIFORNIA INST OF TECHN (US)
TANG HONGXING (US)
ROUKES MICHAEL L (US)
TANG HONGXING (US)
ROUKES MICHAEL L (US)
International Classes:
G01L1/00; G01B5/28; G01L1/18; G01L1/20; G01L19/04; G01N13/16; G12B21/08
Foreign References:
| US20020175408A1 | 2002-11-28 | |||
| US3034345A | 1962-05-15 | |||
| US20030203531A1 | 2003-10-30 |
Other References:
TORTONESE M. ET AL.: "Atomic resolution with an atomic force microscope using piezoresistive detection", APPL. PHYS. LETT., vol. 62, no. 8, 22 February 1993 (1993-02-22), pages 813, XP000338616
LI C. ET AL.: "Thin gold film strain gauges", J. VAC. SCI. TECHNOL. A, vol. 12, no. 3, May 1994 (1994-05-01), pages 813 - 819, XP000442873
YANG Y.T. ET AL.: "Monocrystalline silicon carbide nanoelectromechanical systems", APPLIED PHYSICS LETTERS, vol. 78, no. 2, 8 January 2001 (2001-01-08), pages 162 - 164, XP000994415
THAYSEN J. ET AL.: "Polymer-based stress sensor with integrated readout", J. PHYS. D: APPL. PHYS., vol. 35, 22 October 2002 (2002-10-22), pages 2698 - 2703, XP002299515
LI C. ET AL.: "Thin gold film strain gauges", J. VAC. SCI. TECHNOL. A, vol. 12, no. 3, May 1994 (1994-05-01), pages 813 - 819, XP000442873
YANG Y.T. ET AL.: "Monocrystalline silicon carbide nanoelectromechanical systems", APPLIED PHYSICS LETTERS, vol. 78, no. 2, 8 January 2001 (2001-01-08), pages 162 - 164, XP000994415
THAYSEN J. ET AL.: "Polymer-based stress sensor with integrated readout", J. PHYS. D: APPL. PHYS., vol. 35, 22 October 2002 (2002-10-22), pages 2698 - 2703, XP002299515
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