Title:
STRESS SENSOR
Document Type and Number:
WIPO Patent Application WO/2017/170748
Kind Code:
A1
Abstract:
A stress sensor of the present invention is provided with: a diaphragm; an intermediate layer disposed on a surface of the diaphragm; a sensitive membrane disposed on the intermediate layer; and a piezoresistive element positioned in a region in contact with an outer end of the intermediate layer, said region being a part of the diaphragm.
Inventors:
KOBAYASHI KYOHEI (JP)
UENO RYO (JP)
ABE SHINICHI (JP)
SAKAI HISASHI (JP)
NAGATA MASARU (JP)
YASUDA TAKANORI (JP)
UENO RYO (JP)
ABE SHINICHI (JP)
SAKAI HISASHI (JP)
NAGATA MASARU (JP)
YASUDA TAKANORI (JP)
Application Number:
PCT/JP2017/013026
Publication Date:
October 05, 2017
Filing Date:
March 29, 2017
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
G01N19/00; G01L9/00; G01N5/02
Domestic Patent References:
| WO2013157581A1 | 2013-10-24 | |||
| WO2011148774A1 | 2011-12-01 |
Foreign References:
| JPH0328741A | 1991-02-06 | |||
| JP2009519454A | 2009-05-14 | |||
| JP2012122924A | 2012-06-28 | |||
| JPH01315172A | 1989-12-20 | |||
| JPS5577178A | 1980-06-10 | |||
| JP2002071492A | 2002-03-08 | |||
| JPH1073530A | 1998-03-17 | |||
| JPH11333765A | 1999-12-07 | |||
| JP2010204098A | 2010-09-16 |
Other References:
AKIKO ITAKURA: "Gas Sensing Technique by using Molecular Adsorption on Micro Cantilever Surface", J.VAC.SOC.JPN., vol. 55, no. 8, 2012, pages 383 - 388, XP055429532
YOSHIKAWA.G ET AL.: "Sub-ppm detection of vapors using piezoresistive microcantilever array sensors", NANOTECHNOLOGY, vol. 20, 7 January 2009 (2009-01-07), pages 1 - 5, XP020152962
YOSHIKAWA.G ET AL.: "Sub-ppm detection of vapors using piezoresistive microcantilever array sensors", NANOTECHNOLOGY, vol. 20, 7 January 2009 (2009-01-07), pages 1 - 5, XP020152962
Attorney, Agent or Firm:
SUGIMURA Kenji (JP)
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