Title:
STRESS SENSOR
Document Type and Number:
WIPO Patent Application WO/2018/151083
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a stress sensor whereby stress in any in-plane direction can be detected by a single element. The stress sensor according to an embodiment of the present invention has a stress detection layer 3 including a layered body formed by layering a first magnetic layer 31, a first nonmagnetic layer 30, and a second magnetic layer 32, the first magnetic layer 31 and the second magnetic layer 32 having mutually different magnetoelastic coupling constants, and stress being detected by an electrical resistance that is dependent upon the relative angle of magnetization of the first magnetic layer 31 and the second magnetic layer 32, which changes dependent on an externally applied stress.
Inventors:
CHIBA DAICHI (JP)
ANDO AKIRA (JP)
ANDO AKIRA (JP)
Application Number:
PCT/JP2018/004853
Publication Date:
August 23, 2018
Filing Date:
February 13, 2018
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
UNIV TOKYO (JP)
UNIV TOKYO (JP)
International Classes:
G01L1/12
Foreign References:
| JP2015059932A | 2015-03-30 | |||
| JP2012204479A | 2012-10-22 | |||
| US20070186666A1 | 2007-08-16 | |||
| US20060246271A1 | 2006-11-02 |
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (JP)
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