Title:
STRETCHING DEVICE, DEVICE FOR VAPOR DEPOSITION MASK MANUFACTURING, AND METHOD FOR VAPOR DEPOSITION MANUFACTURING
Document Type and Number:
WIPO Patent Application WO/2018/198302
Kind Code:
A1
Abstract:
Provided is a stretching device (1) that imparts tension to a vapor deposition mask (5), wherein the stretching device (1) is provided with: tension drive devices (31 – 34) for stretching tension end parts (51 – 54) provided in at least two locations apiece on both ends of a vapor deposition mask (1) so as to impart the tensile strength to the vapor deposition mask (5); rotating mechanisms (21 – 24) for rotating the tension end parts (51 – 54) along end edge parts in the direction the vapor deposition mask (5) is stretched around drive shafts (21a – 24a) extending in a direction perpendicular to the surface of the vapor deposition mask (5); displacement sensors 8, 9 for detecting displacement of the end edge parts on which the tensile strength operates in the vapor deposition mask (5); and a control device (1) for controlling the rotating mechanisms (21 – 24) so as to rotate the rotating mechanisms (21 – 24) at the angle of rotation and a direction of rotation in correspondence with the displacement detected by the displacement sensors (8, 9).
Inventors:
NAKAJIMA SHINSAKU
Application Number:
PCT/JP2017/016886
Publication Date:
November 01, 2018
Filing Date:
April 28, 2017
Export Citation:
Assignee:
SHARP KK (JP)
International Classes:
C23C14/24; C23C14/04
Domestic Patent References:
| WO2011034011A1 | 2011-03-24 |
Foreign References:
| JP2015028204A | 2015-02-12 | |||
| JP2012233251A | 2012-11-29 |
Attorney, Agent or Firm:
HARAKENZO WORLD PATENT & TRADEMARK (JP)
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