STRIPPING AGENT AGAINST RESIST RESIDUES

Title:

STRIPPING AGENT AGAINST RESIST RESIDUES

Document Type and Number:

WIPO Patent Application WO/2000/034996

Kind Code:

A1

Abstract:

A nonpoisonous, nondeleterious and nondangerous stripping agent against resist residues which makes it possible to strip resist residues safely without causing problems such as corrosion of metal, being an aqueous solution containing ammonium phosphate and/or a condensed ammonium phosphate and having a pH of 1 to 10.

Inventors:

YATA TAKASHI (JP)
TERAYAMA SHIGEKI (JP)
KOINUMA YUTAKA (JP)
OHGUSHI TAKERU (JP)

Application Number:

PCT/JP1999/006915

Publication Date:

June 15, 2000

Filing Date:

December 09, 1999

Export Citation:

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Assignee:

KISHIMOTO SANGYO CO (JP)
YATA TAKASHI (JP)
TERAYAMA SHIGEKI (JP)
KOINUMA YUTAKA (JP)
OHGUSHI TAKERU (JP)

International Classes:

H01L21/302; G03F7/42; H01L21/027; H01L21/304; H01L21/3065; H01L21/308; H01L21/311; (IPC1-7): H01L21/308; G03F7/42; H01L21/027; H01L21/304

Foreign References:

JPS6415740A	1989-01-19
JPS5724540A	1982-02-09
US5292626A	1994-03-08
JPH06118660A	1994-04-28

Other References: