Title:
STRIPPING AGENT COMPOSITION AND METHOD OF STRIPPING
Document Type and Number:
WIPO Patent Application WO/2002/001300
Kind Code:
A1
Abstract:
A stripping agent composition comprising (a) an anticorrosive, (b) a stripping agent, and (c) a solvent, characterized in that the anticorrosive (a) is a heterocyclic compound having a six-membered ring containing a nitrogen atom.
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Inventors:
Koito, Tatsuya c/o NEC Corporation 7-1 (Shiba 5-chome Minato-ku, Tokyo, 108-8001, JP)
Hirano, Keiji c/o NEC Corporation 7-1 (Shiba 5-chome Minato-ku, Tokyo, 108-8001, JP)
Aoki, Hidemitsu c/o NEC Corporation 7-1 (Shiba 5-chome Minato-ku, Tokyo, 108-8001, JP)
Tomimori, Hiroaki c/o NEC Corporation 7-1 (Shiba 5-chome Minato-ku, Tokyo, 108-8001, JP)
Hirano, Keiji c/o NEC Corporation 7-1 (Shiba 5-chome Minato-ku, Tokyo, 108-8001, JP)
Aoki, Hidemitsu c/o NEC Corporation 7-1 (Shiba 5-chome Minato-ku, Tokyo, 108-8001, JP)
Tomimori, Hiroaki c/o NEC Corporation 7-1 (Shiba 5-chome Minato-ku, Tokyo, 108-8001, JP)
Application Number:
PCT/JP2001/005505
Publication Date:
January 03, 2002
Filing Date:
June 27, 2001
Export Citation:
Assignee:
NEC CORPORATION (7-1 Shiba 5-chome Minato-ku, Tokyo, Tokyo, 108-8001, JP)
Koito, Tatsuya c/o NEC Corporation 7-1 (Shiba 5-chome Minato-ku, Tokyo, 108-8001, JP)
Hirano, Keiji c/o NEC Corporation 7-1 (Shiba 5-chome Minato-ku, Tokyo, 108-8001, JP)
Aoki, Hidemitsu c/o NEC Corporation 7-1 (Shiba 5-chome Minato-ku, Tokyo, 108-8001, JP)
Tomimori, Hiroaki c/o NEC Corporation 7-1 (Shiba 5-chome Minato-ku, Tokyo, 108-8001, JP)
Koito, Tatsuya c/o NEC Corporation 7-1 (Shiba 5-chome Minato-ku, Tokyo, 108-8001, JP)
Hirano, Keiji c/o NEC Corporation 7-1 (Shiba 5-chome Minato-ku, Tokyo, 108-8001, JP)
Aoki, Hidemitsu c/o NEC Corporation 7-1 (Shiba 5-chome Minato-ku, Tokyo, 108-8001, JP)
Tomimori, Hiroaki c/o NEC Corporation 7-1 (Shiba 5-chome Minato-ku, Tokyo, 108-8001, JP)
International Classes:
C11D7/32; C11D11/00; G03F7/42; H01L21/02; H01L21/306; H01L21/311; H01L21/768; (IPC1-7): G03F7/42; H01L21/304; C23F11/00
Attorney, Agent or Firm:
Kaneda, Nobuyuki (8th Floor, 16th Kowa Bldg. 9-20 Akasaka 1-chome Minato-ku, Tokyo, 107-0052, JP)
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