Title:
STRIPPING COMPOSITION, TFT SUBSTRATE MANUFACTURING METHOD, AND STRIPPING COMPOSITION RECYCLING METHOD
Document Type and Number:
WIPO Patent Application WO/2007/148538
Kind Code:
A1
Abstract:
Provided are a stripping composition capable of improving quality and productivity and
improving a working environment, a TFT substrate manufacturing method, and
a stripping composition recycling method. The TFT substrate manufacturing method
comprises the step of forming a thin film transistor (1050), a protective insulating
film (1054) and a resist (1055) over a glass substrate (1010) thereby to form an
undercut portion (1554), the step of forming a conductor film (1611) and a pixel
electrode (1612) separated from each other, the stripping step of feeding a stripping
composition and melting a reformed resist (1553) thereby to strip a conductor
film (1611), and the recycle step of melting the conductor film (1611) over the
resist into the used stripping composition containing the conductor film (1611),
thereby to reuse the used stripping composition.
Inventors:
INOUE, Kazuyoshi (1280, Kamiizumi Sodegaura-sh, Chiba 93, 2990293, JP)
井上 一吉 (〒93 千葉県袖ヶ浦市上泉１２８０番地 Chiba, 2990293, JP)
MATSUBARA, Masato (1280, Kamiizumi Sodegaura-sh, Chiba 93, 2990293, JP)
井上 一吉 (〒93 千葉県袖ヶ浦市上泉１２８０番地 Chiba, 2990293, JP)
MATSUBARA, Masato (1280, Kamiizumi Sodegaura-sh, Chiba 93, 2990293, JP)
Application Number:
JP2007/061508
Publication Date:
December 27, 2007
Filing Date:
June 07, 2007
Export Citation:
Assignee:
IDEMITSU KOSAN CO., LTD. (1-1 Marunouchi 3-chome, Chiyoda-ku, Tokyo 21, 1008321, JP)
出光興産株式会社 (〒21 東京都千代田区丸の内三丁目１番１号 Tokyo, 1008321, JP)
INOUE, Kazuyoshi (1280, Kamiizumi Sodegaura-sh, Chiba 93, 2990293, JP)
井上 一吉 (〒93 千葉県袖ヶ浦市上泉１２８０番地 Chiba, 2990293, JP)
出光興産株式会社 (〒21 東京都千代田区丸の内三丁目１番１号 Tokyo, 1008321, JP)
INOUE, Kazuyoshi (1280, Kamiizumi Sodegaura-sh, Chiba 93, 2990293, JP)
井上 一吉 (〒93 千葉県袖ヶ浦市上泉１２８０番地 Chiba, 2990293, JP)
International Classes:
H01L21/306; H01L21/3205; H01L21/336; H01L29/786
Attorney, Agent or Firm:
WATANABE, Kihei (Shibashin Kanda Bldg, 3rd Floor26, Kanda Suda-cho 1-chome,Chiyoda-ku, Tokyo 41, 1010041, JP)
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