Title:
STRONTIUM PRECURSOR, METHOD FOR PREPARING SAME, AND METHOD FOR FORMING THIN FILM BY USING SAME
Document Type and Number:
WIPO Patent Application WO/2013/165212
Kind Code:
A1
Abstract:
The present invention relates to a novel strontium precursor comprising a beta-diketonate compound, wherein the strontium precursor can form a high-quality strontium thin film due to its thermal stability and high volatility.
Inventors:
PARK BO-KEUN (KR)
CHUNG TAEK-MO (KR)
KIM CHANG-GYOUN (KR)
GEORGE SHEBY MARY (KR)
LEE YOUNG-KUK (KR)
LIM JONG-SUN (KR)
JEONG SEOG-JONG (KR)
JEON DONG-JU (KR)
AN KI-SEOK (KR)
LEE SUN-SOOK (KR)
CHUNG TAEK-MO (KR)
KIM CHANG-GYOUN (KR)
GEORGE SHEBY MARY (KR)
LEE YOUNG-KUK (KR)
LIM JONG-SUN (KR)
JEONG SEOG-JONG (KR)
JEON DONG-JU (KR)
AN KI-SEOK (KR)
LEE SUN-SOOK (KR)
Application Number:
PCT/KR2013/003866
Publication Date:
November 07, 2013
Filing Date:
May 03, 2013
Export Citation:
Assignee:
KOREA RES INST CHEM TECH (KR)
International Classes:
C07F3/00; C23C16/18
Foreign References:
| US20100291299A1 | 2010-11-18 | |||
| US20100095865A1 | 2010-04-22 | |||
| US20060178006A1 | 2006-08-10 | |||
| US20100034719A1 | 2010-02-11 |
Attorney, Agent or Firm:
Hanyang Patent Firm (KR)
한양특허법인 (KR)
한양특허법인 (KR)
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