STRUCTURE OF DISPLACEMENT MONITORING ELECTRODE

Title:

STRUCTURE OF DISPLACEMENT MONITORING ELECTRODE

Document Type and Number:

WIPO Patent Application WO/2013/021467

Kind Code:

A1

Abstract:

In this structure of displacement monitoring electrode, in order to maintain a constant target amplitude of a detection mass even if the relative relationship between a fixed electrode and a movable electrode changes, the fixed electrode secured to a substrate and the movable electrode capable of being displaced in a predetermined axial direction, each of which has a comb-like shape and is constituted by a base and electrode fingers extending from the base in the predetermined axial direction parallel to the substrate, are arranged to be opposed to each other so that the electrode fingers of the respective electrodes are engaged with each other, and the displacement of the detection mass to be driven at the target amplitude is monitored on the basis of the amount of change in the capacitance between the fixed electrode and the movable electrode. The change sensitivity for the change amount of the capacitance relative to the displacement of the movable electrode in the predetermined axial direction is larger after the displacement of the movable electrode in the predetermined axial direction reaches an target displacement corresponding to the target amplitude of the detection mass, compared to the change sensitivity before the displacement of the movable electrode reaches the target displacement.

Inventors:

NARITA KATSUTOSHI (JP)

Application Number:

PCT/JP2011/068177

Publication Date:

February 14, 2013

Filing Date:

August 09, 2011

Export Citation:

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Assignee:

TOYOTA MOTOR CO LTD (JP)
NARITA KATSUTOSHI (JP)

International Classes:

G01C19/56; G01B7/00

Foreign References:

JP2001227954A	2001-08-24
JP2000055670A	2000-02-25
JPH10504386A	1998-04-28
JP2001050704A	2001-02-23
JP2008170455A	2008-07-24

Other References: