Title:
STRUCTURED ILLUMINATION DEVICE AND STRUCTURED ILLUMINATION MICROSCOPE DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/008415
Kind Code:
A1
Abstract:
In order to obtain the desired super-resolution effect in each of a plurality of wavelengths, a structured illumination device according to an example of the present invention is provided with a diffraction unit for diffracting, into a plurality of diffracted light beams, an emitted light beam from a light source for emitting light of a plurality of wavelengths simultaneously or sequentially, and an optical system for forming, on the sample surface, an interference pattern from the diffraction light beams diffracted by the diffraction unit. The optical system includes a first optical system, and a second optical system for collecting the diffracted light beams onto positions on the pupil plane, or a plane in the vicinity of the pupil, of the first optical system. The magnification characteristics (dY(λ)) of the second optical system with respect to the wavelengths satisfies the following condition. (fo･nw - afλ/P) ≤ dY(λ) ≤ (fo･NA – afλ/P) and a = 1 (when M = 1 or 2) or a = 2 (when M = 3), where M represents the number of directions of the periodic structure of the diffraction unit, λ represents each of the wavelengths, dY(λ) represents the difference between the image height 2f･λ0/P for the reference wavelength λ0 and the image height 2f･λ/P for each of the wavelengths λ from amongst the plurality of wavelengths when the reference wavelength for the plurality of wavelengths is λ0, fo represents the focal distance for the reference wavelength λ0 of the first optical system, f represents the focal distance for the reference wavelength λ0 of the second optical system, P represents the structural period of the diffraction unit, NA represents the number of openings of the first optical system, and nw represents the refractive index of the sample.
Inventors:
NAKAYAMA HIROAKI (JP)
OUCHI YUMIKO (JP)
OUCHI YUMIKO (JP)
Application Number:
PCT/JP2014/002855
Publication Date:
January 22, 2015
Filing Date:
May 29, 2014
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G02B21/06; G01N21/64; G02B21/36
Domestic Patent References:
| WO2011135819A1 | 2011-11-03 | |||
| WO2007043314A1 | 2007-04-19 | |||
| WO2008072597A1 | 2008-06-19 |
Foreign References:
| JP2009157084A | 2009-07-16 | |||
| JP2009098215A | 2009-05-07 | |||
| JP2012504252A | 2012-02-16 |
Attorney, Agent or Firm:
FURUYA, Fumio et al. (JP)
Furuya History Wang (JP)
Furuya History Wang (JP)
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