Title:
SUB-FILM DEFECT DETECTION METHOD AND SUB-FILM DEFECT DETECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/113955
Kind Code:
A1
Abstract:
A sub-film defect detection method and a sub-film defect detection device (100). The sub-film defect detection method comprises the steps of: detecting, by means of an optical microscope (10), an object to be detected (Y), and determining first coordinate information of a defect of the detected object (Y) (S10); according to the positional relationship between the optical microscope (10) and a scanning apparatus (20) and the positional relationship between the optical microscope and a cutting apparatus (30), and the first coordinate information, determining second coordinate information of the defect of the detected object (Y) and the scanning apparatus (20), and determining third coordinate information of the defect of the detected object (Y) and the cutting apparatus (30) (S20); and according to the third coordinate information, controlling the cutting apparatus (30) so that same cuts the detected object (Y), and according to the second coordinate information, controlling the scanning apparatus (20) so that same scans a defect of the cut detected object (Y) (S30).
Inventors:
HONG RI (CN)
ZHOU ZHENHUA (CN)
ZHAO YUNFEI (CN)
LIU YAO (CN)
ZHOU ZHENHUA (CN)
ZHAO YUNFEI (CN)
LIU YAO (CN)
Application Number:
PCT/CN2017/116532
Publication Date:
June 20, 2019
Filing Date:
December 15, 2017
Export Citation:
Assignee:
SHENZHEN ROYOLE TECHNOLOGIES CO LTD (CN)
International Classes:
G01N23/04; G02F1/13
Foreign References:
| CN106597700A | 2017-04-26 | |||
| CN105486688A | 2016-04-13 | |||
| CN105548195A | 2016-05-04 | |||
| CN104792793A | 2015-07-22 | |||
| CN106442560A | 2017-02-22 | |||
| CN1801470A | 2006-07-12 | |||
| US20130114881A1 | 2013-05-09 |
Attorney, Agent or Firm:
TSINGYIHUA INTELLECTUAL PROPERTY LLC (CN)
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