SUBMERGED PLASMA GENERATOR, METHOD OF GENERATING PLASMA IN LIQUID AND METHOD OF DECOMPOSING TOXIC SUBSTANCE WITH PLASMA IN LIQUID

Title:

SUBMERGED PLASMA GENERATOR, METHOD OF GENERATING PLASMA IN LIQUID AND METHOD OF DECOMPOSING TOXIC SUBSTANCE WITH PLASMA IN LIQUID

Document Type and Number:

WIPO Patent Application WO/2003/086615

Kind Code:

A1

Abstract:

A submerged plasma generator comprising bubble forming means for forming bubbles in a liquid and an electromagnetic wave generator for radiating electromagnetic waves in a liquid, wherein plasma is generated by, while forming bubbles in a liquid, irradiating the bubbles with electromagnetic waves so that plasma which has high energy but is macroscopically of low temperature and which is safe and is easy to handle can be realized. The submerged plasma generator can be used in, for example, the formation of a film on a substrate and the decomposition of toxic substances such as dioxin.

Inventors:

Nomura, Shinfuku c/o Faculty of Engineering (Ehime University 3, Bunkyo-ch, Matsuyama-shi Ehime, 790-8577, JP)
Toyota, Hiromichi c/o Faculty of Engineering (Ehime University 3, Bunkyo-ch, Matsuyama-shi Ehime, 790-8577, JP)

Application Number:

PCT/JP2003/004139

Publication Date:

October 23, 2003

Filing Date:

March 31, 2003

Export Citation:

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Assignee:

TECHNO NETWORK SHIKOKU CO., LTD. (2-5 Marunouchi, Takamatsu-shi, Kagawa, 760-0033, JP)
Nomura, Shinfuku c/o Faculty of Engineering (Ehime University 3, Bunkyo-ch, Matsuyama-shi Ehime, 790-8577, JP)
Toyota, Hiromichi c/o Faculty of Engineering (Ehime University 3, Bunkyo-ch, Matsuyama-shi Ehime, 790-8577, JP)

International Classes:

A62D3/13; A62D3/17; A62D3/19; B01D19/00; B01J10/00; B01J19/08; B01J19/10; B01J19/12; C23C16/26; C23C16/27; C23C16/50; C23C16/511; H05H1/24; A62D101/22; A62D101/28; (IPC1-7): B01J19/08; B01J19/10; B01J19/00; H05H1/24; A62D3/00; B01D19/00