Title:
SUBMICRON CLOSED-FORM JOSEPHSON JUNCTIONS
Document Type and Number:
WIPO Patent Application WO2003019686
Kind Code:
A3
Abstract:
A method for fabricating a closed-form Josephson junction includes etching the inner shape of the closed-form junction on the chip, depositing a negative photoresist material over the etched chip, and flood exposing the backside of the chip with ultraviolet radiation. The photoresist is developed and then baked onto the chip. The baked photoresist serves as a mask for subsequent etching of the exterior of the closed-form Josephson junction. A shaped Josephson junction is fabricated with junction widths between about 0.1 mu m and about 1 mu m and an inner diameter ranging between about 1 mu m and about 1000 mu m.
Inventors:
KOVAL YURI
USTINOV ALEXEY V
HILTON JEREMY P
USTINOV ALEXEY V
HILTON JEREMY P
Application Number:
PCT/CA2002/001328
Publication Date:
March 04, 2004
Filing Date:
August 28, 2002
Export Citation:
Assignee:
DWAVE SYS INC (CA)
International Classes:
H01L39/24; (IPC1-7): H01L39/24; H01L39/22
Foreign References:
| EP0476844A1 | 1992-03-25 |
Other References:
LISITSKII M P ET AL: "Annular Josephson junctions for radiation detection: fabrication and investigation of the magnetic behaviour", NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, SECTION - A: ACCELERATORS, SPECTROMETERS, DETECTORS AND ASSOCIATED EQUIPMENT, NORTH-HOLLAND PUBLISHING COMPANY. AMSTERDAM, NL, vol. 444, no. 1-2, April 2000 (2000-04-01), pages 476 - 479, XP004196459, ISSN: 0168-9002
POTTS A ET AL: "CMOS compatible fabrication methods for submicron Josephson junction qubits", IEE PROCEEDINGS: SCIENCE, MEASUREMENT AND TECHNOLOGY, IEE, STEVENAGE, HERTS, GB, vol. 148, no. 5, 5 September 2001 (2001-09-05), pages 225 - 228, XP006017317, ISSN: 1350-2344
HADFIELD R H ET AL: "Novel Josephson junction geometries in NbCu bilayers fabricated by focused ion beam microscope", PHYSICA C, NORTH-HOLLAND PUBLISHING, AMSTERDAM, NL, vol. 367, no. 1-4, 15 February 2002 (2002-02-15), pages 267 - 271, XP004332041, ISSN: 0921-4534
POTTS A ET AL: "CMOS compatible fabrication methods for submicron Josephson junction qubits", IEE PROCEEDINGS: SCIENCE, MEASUREMENT AND TECHNOLOGY, IEE, STEVENAGE, HERTS, GB, vol. 148, no. 5, 5 September 2001 (2001-09-05), pages 225 - 228, XP006017317, ISSN: 1350-2344
HADFIELD R H ET AL: "Novel Josephson junction geometries in NbCu bilayers fabricated by focused ion beam microscope", PHYSICA C, NORTH-HOLLAND PUBLISHING, AMSTERDAM, NL, vol. 367, no. 1-4, 15 February 2002 (2002-02-15), pages 267 - 271, XP004332041, ISSN: 0921-4534
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