Title:
SUBSTANCE DETECTING DEVICE, SUBSTANCE DETECTING SYSTEM, AND SEMICONDUCTOR INTEGRATED CIRCUIT SYSTEM
Document Type and Number:
WIPO Patent Application WO/2022/202290
Kind Code:
A1
Abstract:
A substance detecting device (1) comprises a support member (9), and a substance detecting sensor (10) provided on the support member (9). The substance detecting sensor (10) includes a first capacitor (11). The first capacitor (11) includes a first electrode (12), an insulating layer (14), and a second electrode (15) which faces the first electrode (12) and which is formed on the insulating layer (14). The second electrode (15) is formed from a material which can change into an insulator by reacting chemically with a substance (51) being measured.
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Inventors:
MAEKAWA YUKI (JP)
KOHIGASHI AYA (JP)
KOHIGASHI AYA (JP)
Application Number:
PCT/JP2022/010004
Publication Date:
September 29, 2022
Filing Date:
March 08, 2022
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
G01N27/12; G01N27/22
Foreign References:
| JP2017032516A | 2017-02-09 | |||
| JPH1073558A | 1998-03-17 | |||
| JP2017116460A | 2017-06-29 | |||
| JP2015132609A | 2015-07-23 | |||
| JPH01163648A | 1989-06-27 | |||
| US20170089828A1 | 2017-03-30 |
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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