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Title:
SUBSTANCE DETECTING ELEMENT
Document Type and Number:
WIPO Patent Application WO/2018/180589
Kind Code:
A1
Abstract:
A supporting substrate (2) has a through hole (3) provided therein. Plate-like beams (4 (4A, 4B)): each extend from an edge of the through hole (3) to the opposed edge so as to partially close the through hole (3); support a substance adsorption film to which a constitutive substance to be detected adheres; and have a piezoelectric element the vibration frequency of which varies upon adhesion of the constitutive substance to the substance adsorption film. Drive electrodes (16) vibrate and deform the beams (4) by applying voltage to the piezoelectric element. Detecting electrodes (17) detect information about the vibration frequencies of the beams (4).

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Inventors:
OGATA KENJI (JP)
KUROGI SHOGO (JP)
Application Number:
PCT/JP2018/010449
Publication Date:
October 04, 2018
Filing Date:
March 16, 2018
Export Citation:
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Assignee:
DAI ICHI SEIKO CO LTD (JP)
International Classes:
G01N5/02; G01N19/00
Domestic Patent References:
WO2013157581A12013-10-24
Foreign References:
US20140305191A12014-10-16
JP2007240252A2007-09-20
JP2010032389A2010-02-12
JP2009204584A2009-09-10
US20100000292A12010-01-07
JP2009204584A2009-09-10
JP2017070353A2017-04-13
Other References:
See also references of EP 3605057A4
Attorney, Agent or Firm:
KIMURA Mitsuru (JP)
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