Title:
SUBSTRATE ACCOMMODATION CONTAINER
Document Type and Number:
WIPO Patent Application WO/2020/065968
Kind Code:
A1
Abstract:
This substrate accommodation container comprises: a container body; a lid that can be attached/detached to/from an opening of the container body, and that can seal off the opening of the container body; and a sealing member that, together with the lid, seals off the opening of the container body. If the supply quantity of a gas supplied to a substrate accommodation space from a space outside of the container body through a supply filter is less than or equal to 22 L per minute, then the airtightness of the substrate accommodation space is increased so that 50% or more of the gas supplied to the substrate accommodation space can be discharged through a discharge filter.
Inventors:
NARITA YUYA (JP)
Application Number:
PCT/JP2018/036457
Publication Date:
April 02, 2020
Filing Date:
September 28, 2018
Export Citation:
Assignee:
MIRAIAL CO LTD (JP)
International Classes:
H01L21/673; B65D85/30
Foreign References:
| JP2004179449A | 2004-06-24 | |||
| JP2018041925A | 2018-03-15 |
Attorney, Agent or Firm:
SHOBAYASHI Masayuki et al. (JP)
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