Title:
SUBSTRATE CARRIER MEASURING JIG, COLLISION PREVENTING JIG, AND COLLISION PREVENTING METHOD USING THE COLLISION PREVENTING JIG
Document Type and Number:
WIPO Patent Application WO/2010/119846
Kind Code:
A1
Abstract:
Provided is a wafer carrier measuring jig which can measure the slot height of a wafer carrier placed on a load port and can determine whether the discretionary slot is horizontal or not. A collision preventing jig and a collision preventing method using the collision preventing jig are also provided.
The wafer carrier measuring jig includes: a base member (21), which is provided with a carrier placing section (210) having three kinematic pins (211) disposed corresponding to three V-shaped grooves provided on the bottom surface of a wafer carrier (10) having a pair of slot sections (12) in which a wafer (11) is stored; a measuring means (22), which is provided by being affixed on the base member (21) and has a sensor (250) which measures the height from a predetermined reference value, the slot pitch and the slot horizontality with respect to at least some slots of both the slot sections (12); and a write means (23), which is provided on the carrier placing section (210) of the base member (21) and writes information obtained from the measuring means (22) in an ID information storage means provided in the wafer carrier (10).
Inventors:
MORI SHOICHI (JP)
NAKAMURA HIROFUMI (JP)
NAKAMURA HIROFUMI (JP)
Application Number:
PCT/JP2010/056546
Publication Date:
October 21, 2010
Filing Date:
April 12, 2010
Export Citation:
Assignee:
HIRATA SPINNING (JP)
MORI SHOICHI (JP)
NAKAMURA HIROFUMI (JP)
MORI SHOICHI (JP)
NAKAMURA HIROFUMI (JP)
International Classes:
H01L21/68
Foreign References:
| JP2004266221A | 2004-09-24 | |||
| JP2001332611A | 2001-11-30 | |||
| JPH07125806A | 1995-05-16 | |||
| JPH08105726A | 1996-04-23 | |||
| JP2003051526A | 2003-02-21 | |||
| JP2004536443A | 2004-12-02 |
Attorney, Agent or Firm:
INOUE, MOTOHIRO (JP)
Inoue Motohiro (JP)
Inoue Motohiro (JP)
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