Title:
SUBSTRATE CLEANER
Document Type and Number:
WIPO Patent Application WO/2020/168724
Kind Code:
A1
Abstract:
A substrate cleaner comprises a water washing unit. The water washing unit comprises a cover plate cleaning unit (104) used to clean a surface of a water jet cover plate (102) with a cleaning solution. When a water jet unit cleans a substrate, the above arrangement can avoid the issue of stagnant water dripping on the substrate from a water jet cover plate (102), thereby solving the technical problem in the art in which stagnant water on a water jet cover plate (102) drips on a substrate and results in incomplete cleaning of the substrate.
More Like This:
| JP3002802 | [Name of device] Cleaning device |
| WO/2016/097852 | DEVICE FOR EMITTING A LIQUID |
| WO/2014/089566 | SOLAR PANEL WITH WATER PUMP |
Inventors:
CHEN GUOLIANG (CN)
Application Number:
PCT/CN2019/109863
Publication Date:
August 27, 2020
Filing Date:
October 08, 2019
Export Citation:
Assignee:
SHENZHEN CHINA STAR OPTOELECT (CN)
International Classes:
B08B3/02; B08B1/00; B08B11/04
Foreign References:
| CN109772794A | 2019-05-21 | |||
| CN108933092A | 2018-12-04 | |||
| CN103752571A | 2014-04-30 | |||
| JPH11179299A | 1999-07-06 | |||
| JPH06273919A | 1994-09-30 |
Attorney, Agent or Firm:
ESSEN PATENT & TRADEMARK AGENCY (CN)
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