Title:
SUBSTRATE CLEANING DEVICE AND METHOD FOR CLEANING SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2019/095383
Kind Code:
A1
Abstract:
Disclosed is a substrate cleaning device. The substrate cleaning device comprises: a cleaning unit (100), the cleaning unit (100) comprising a cleaning tank (110) and a recycling tank (120), wherein the recycling tank (120) is configured to be able to recycle the water in the cleaning tank (110) and provide a secondary supply of same to the cleaning tank (110); and a sterilization unit (200), the sterilization unit (200) being used for sterilizing the water in the recycling tank (120).
Inventors:
XU SHUNLONG (CN)
XIE ZHONGWEI (CN)
XIE ZHONGWEI (CN)
Application Number:
PCT/CN2017/111933
Publication Date:
May 23, 2019
Filing Date:
November 20, 2017
Export Citation:
Assignee:
SHENZHEN ROYOLE TECHNOLOGIES CO LTD (CN)
International Classes:
C02F1/32; B08B11/00
Foreign References:
| CN202729846U | 2013-02-13 | |||
| CN103964541A | 2014-08-06 | |||
| CN203875055U | 2014-10-15 | |||
| CN206064912U | 2017-04-05 | |||
| CN103567181A | 2014-02-12 | |||
| JP5802483B2 | 2015-10-28 |
Attorney, Agent or Firm:
TSINGYIHUA INTELLECTUAL PROPERTY LLC (CN)
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