Title:
SUBSTRATE CONVEYANCE DEVICE, AND METHOD FOR TEACHING SUBSTRATE CONVEYANCE ROBOT
Document Type and Number:
WIPO Patent Application WO/2017/150551
Kind Code:
A1
Abstract:
A controller uses one optical sensor selected from among a first optical sensor and at least one second optical sensor to move a substrate conveyance hand to a detection start position in which the optical path of the optical sensor is above a substrate placement part and does not interfere with a column part. The controller moves the substrate conveyance hand downwards from the detection start position to a detection position at which an object is detected by the optical sensor, and stores, as the height position of the substrate placement part, the height from a prescribed positional reference in the optical path of the optical sensor when the substrate conveyance hand is in the detection position.
Inventors:
YOSHIDA MASAYA
OKADA HIROYUKI
FUKUSHIMA TAKAYUKI
GOTO HIROHIKO
OKADA HIROYUKI
FUKUSHIMA TAKAYUKI
GOTO HIROHIKO
Application Number:
PCT/JP2017/007882
Publication Date:
September 08, 2017
Filing Date:
February 28, 2017
Export Citation:
Assignee:
KAWASAKI HEAVY IND LTD (JP)
International Classes:
H01L21/677; B25J9/22
Domestic Patent References:
| WO2009145082A1 | 2009-12-03 |
Foreign References:
| JP2002009135A | 2002-01-11 | |||
| JP2009506518A | 2009-02-12 | |||
| JP2010284728A | 2010-12-24 | |||
| JP2014099576A | 2014-05-29 |
Attorney, Agent or Firm:
PATENT CORPORATE BODY ARCO PATENT OFFICE (JP)
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