Title:
SUBSTRATE CONVEYANCE DEVICE AND STATIC ERASER
Document Type and Number:
WIPO Patent Application WO/2011/145617
Kind Code:
A1
Abstract:
Disclosed is a substrate conveyance device which makes it readily possible to inhibit the generation of electrostatic breakdown which occurs in a substrate. A substrate conveyance device (100) for conveying a substrate (10) comprises: rotatable rollers (20) for moving the substrate (10); and a spray device (30) which is disposed between adjacent rollers (20 (20a, 20b)) in order to spray the rear surface (10b) of the substrate (10) with steam (35).
Inventors:
NAGAHARA, Kohhei (())
Application Number:
JP2011/061319
Publication Date:
November 24, 2011
Filing Date:
May 17, 2011
Export Citation:
Assignee:
SHARP KABUSHIKI KAISHA (22-22, Nagaike-cho Abeno-ku, Osaka-sh, Osaka 22, 〒5458522, JP)
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町２２番２２号 Osaka, 〒5458522, JP)
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町２２番２２号 Osaka, 〒5458522, JP)
International Classes:
B65G49/06; H01L21/677
Attorney, Agent or Firm:
TESHIMA Masaru (Teshima Patent Law Firm, 5F MF MinamiMorimachi Bldg. 2-3-8, Tenjinbashi, Kita-ku, Osaka-sh, Osaka 41, 〒5300041, JP)
Download PDF:
Claims: