Title:
SUBSTRATE CONVEYANCE ROBOT AND SUBSTRATE PROCESSING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2017/038811
Kind Code:
A1
Abstract:
A control means (12) of this substrate conveyance robot (1) causes a robot arm (4) and a substrate holding device (7) to perform a blade member entering motion, a substrate receiving motion, and a substrate mounting motion. The substrate holding device (7) is configured to be switchable between: a first operation state in which a pair of blade members (25, 26) are arranged in the vertical direction; and a second operation state in which the pair of blade members (25, 26) are arranged at positions so as to be misaligned from each other in the vertical direction, and in which a single blade member is allowed to enter a substrate mounting structure. Takt time during substrate conveyance can be shortened irrespective of the type of the substrate mounting structure.
Inventors:
GOTO HIROHIKO (JP)
MARK TANG (US)
ERIC CHAN (US)
ONO SHIGEKI (US)
KITANO SHINYA (US)
MING ZENG (US)
MARK TANG (US)
ERIC CHAN (US)
ONO SHIGEKI (US)
KITANO SHINYA (US)
MING ZENG (US)
Application Number:
PCT/JP2016/075309
Publication Date:
March 09, 2017
Filing Date:
August 30, 2016
Export Citation:
Assignee:
KAWASAKI HEAVY IND LTD (JP)
KAWASAKI ROBOTICS (USA) INC (US)
KAWASAKI ROBOTICS (USA) INC (US)
International Classes:
H01L21/677
Foreign References:
| JP2014132684A | 2014-07-17 | |||
| JPH07297255A | 1995-11-10 | |||
| JP2013030701A | 2013-02-07 | |||
| JPH11330189A | 1999-11-30 | |||
| JP2013163231A | 2013-08-22 |
Attorney, Agent or Firm:
NAZUKA Satoshi et al. (JP)
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