Title:
SUBSTRATE CONVEYING ROBOT AND END EFFECTOR FOR SAME
Document Type and Number:
WIPO Patent Application WO/2016/166952
Kind Code:
A1
Abstract:
An end effector of a substrate conveying robot is provided with a plurality of blades, blade support parts for supporting the blades such that the inter-blade spacing along a substrate vertical direction varies, and a blade drive device for causing at least one of the plurality of blade support parts to move relatively along the substrate vertical direction with respect to another blade. Each of the blades has a first main surface oriented toward one end along the substrate vertical direction, a second main surface which is on the opposite side to the first main surface, a first substrate-holding mechanism for causing the first main surface to hold a substrate, and a second substrate-holding mechanism for causing the second main surface to hold a substrate.
Inventors:
GOTO HIROHIKO
SUGIYAMA KENJI
SUGIYAMA KENJI
Application Number:
PCT/JP2016/001920
Publication Date:
October 20, 2016
Filing Date:
April 06, 2016
Export Citation:
Assignee:
KAWASAKI HEAVY IND LTD (JP)
International Classes:
H01L21/677; B25J15/00; B25J15/06; B25J15/08; B65G49/07
Foreign References:
| JP2009160711A | 2009-07-23 | |||
| JP2014132684A | 2014-07-17 | |||
| JP2013198960A | 2013-10-03 | |||
| JP2003151968A | 2003-05-23 | |||
| JPH10316242A | 1998-12-02 | |||
| JP2006261377A | 2006-09-28 | |||
| JP2007216329A | 2007-08-30 | |||
| JP2003077988A | 2003-03-14 |
Attorney, Agent or Firm:
PATENT CORPORATE BODY ARCO PATENT OFFICE (JP)
Patent business corporation Owner old patent firm (JP)
Patent business corporation Owner old patent firm (JP)
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