Title:
SUBSTRATE CONVEYING ROBOT AND OPERATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2016/129102
Kind Code:
A1
Abstract:
A substrate conveying robot (1) comprises: a robot arm (4) including an end effector (7) which has a substrate holding means that holds a substrate (S); arm drive means (9,10,11) for driving the robot arm (4); a raising/lowering drive means (8) for driving the end effector (7) to raise/lower the same; a robot control means (12) which controls the arm drive means (9,10,11), the raising/lowering drive means (8), and the substrate holding means; and a substrate detection means (20) which detects the position in the up-down direction of the substrate (S), and which has a substrate detection sensor (20) that is raised/lowered in conjunction with the raising/lowering operation of the end effector (7). Due to this configuration, the position in the up-down direction of the substrate to be conveyed can be accurately detected, and the robot operation can be controlled on the basis of the detection results.
Inventors:
SUGAHARA JUNICHI (JP)
YOSHIDA MASAYA (JP)
YOSHIDA MASAYA (JP)
Application Number:
PCT/JP2015/053970
Publication Date:
August 18, 2016
Filing Date:
February 13, 2015
Export Citation:
Assignee:
KAWASAKI HEAVY IND LTD (JP)
International Classes:
H01L21/677; B25J9/16; B25J13/08
Foreign References:
| JP2002110769A | 2002-04-12 | |||
| JPH11176907A | 1999-07-02 | |||
| JP2015026752A | 2015-02-05 | |||
| JP2012222195A | 2012-11-12 | |||
| JP2014130899A | 2014-07-10 | |||
| JPH08340040A | 1996-12-24 | |||
| JP2005142225A | 2005-06-02 |
Attorney, Agent or Firm:
NAZUKA Satoshi et al. (JP)
Noted mound 聡 (JP)
Noted mound 聡 (JP)
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