Title:
SUBSTRATE CONVEYING ROBOT AND SUBSTRATE PROCESSING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2016/140318
Kind Code:
A1
Abstract:
A control means (12) causes a robot arm (4) and a substrate holding device (7) to execute the following: a blade member entry operation in which a pair of blade members (25, 26) are caused to enter into a substrate loading structure; a substrate receiving operation in which a substrate loaded on an upper level of the substrate loading structure is received by the blade member (25), which was in a state of not holding the substrate; and a substrate loading operation of loading the substrate that is on the blade member (26), which is in a state of holding the substrate, onto a lower level of the substrate loading structure. The timing at which the substrate is received by the substrate receiving operation is staggered with respect to the timing at which the substrate is loaded by the substrate loading operation. Thus, it is possible to provide a substrate conveying robot that can reduce the takt time for substrate conveyance regardless of the type of substrate fixing mode employed in the substrate holding device.
Inventors:
GOTO HIROHIKO (JP)
Application Number:
PCT/JP2016/056636
Publication Date:
September 09, 2016
Filing Date:
March 03, 2016
Export Citation:
Assignee:
KAWASAKI HEAVY IND LTD (JP)
International Classes:
H01L21/677; B25J9/06; B65G49/07
Domestic Patent References:
| WO2010103876A1 | 2010-09-16 |
Foreign References:
| JP2010225895A | 2010-10-07 |
Attorney, Agent or Firm:
NAZUKA Satoshi et al. (JP)
Noted mound 聡 (JP)
Noted mound 聡 (JP)
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