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Patent Searching and Data


Title:
SUBSTRATE CONVEYING ROLLER, THIN FILM MANUFACTURING DEVICE, AND THIN FILM MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2013/076922
Kind Code:
A1
Abstract:
A substrate conveying roller (6) is provided with a first shell (11), a second shell (13), an inner block (3), manifolds (4), and a gap section (15). The first shell (11) has first through-holes (12) serving as gas supplying passages. The inner block (3) is disposed within the first shell (11). The manifolds are formed in the inner block (3) so that, within the range of a specific angle, the manifolds conduct gas toward the first through-holes (12). The gap section (15) is formed so that, outside the range of the specific angle, the gap section (15) conducts the gas toward the first through-holes (12). The second shell (13) has second through-holes for conducting the gas from the manifolds (4) to the first through-holes (12) and is disposed between the first shell (11) and the inner block (3). The axes of the first through-holes (12) are offset from the axes of the second through-holes (14).

Inventors:
OKAZAKI SADAYUKI
HONDA KAZUYOSHI
Application Number:
PCT/JP2012/006963
Publication Date:
May 30, 2013
Filing Date:
October 30, 2012
Export Citation:
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Assignee:
PANASONIC CORP (JP)
International Classes:
C23C14/56; C23C16/54; H01M14/00
Domestic Patent References:
WO2011093073A12011-08-04
WO2010122742A12010-10-28
WO2002070778A12002-09-12
Foreign References:
JP2011214018A2011-10-27
JP2011058079A2011-03-24
JP2010242200A2010-10-28
JPH01152262A1989-06-14
Attorney, Agent or Firm:
KAMADA, Koichi et al. (JP)
Koichi Kamata (JP)
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Claims: