Title:
SUBSTRATE DEBRIS DETECTION METHOD, APPARATUS AND SYSTEM
Document Type and Number:
WIPO Patent Application WO/2018/205742
Kind Code:
A1
Abstract:
Provided is a substrate debris detection method, comprising: when a cut substrate (4) enters a transport passage, collecting a real-time image of the transport passage (S101); and matching and comparing the collected real-time image of the transport passage with a first reference image, and determining whether there is substrate debris in the transport passage according to a comparison result, wherein the first reference image is an image of the transport passage with no substrate debris (S102). In the substrate debris detection method, image processing and imaging matching techniques are used, and substrate debris which has fallen on a transport passage can be accurately and effectively detected, thus preventing a substrate (4) subsequently passing through the transport passage from being scratched. Also provided are a substrate debris detection apparatus (1) and a substrate debris detection system.
Inventors:
ZHANG JIAQIN (CN)
Application Number:
PCT/CN2018/079085
Publication Date:
November 15, 2018
Filing Date:
March 15, 2018
Export Citation:
Assignee:
BOE TECHNOLOGY GROUP CO LTD (CN)
CHONGQING BOE OPTOELECTRONICS TECH CO LTD (CN)
CHONGQING BOE OPTOELECTRONICS TECH CO LTD (CN)
International Classes:
G06T7/30
Foreign References:
| CN107067421A | 2017-08-18 | |||
| CN103913468A | 2014-07-09 | |||
| CN104193159A | 2014-12-10 | |||
| CN202305836U | 2012-07-04 | |||
| JP2010271133A | 2010-12-02 |
Attorney, Agent or Firm:
LIU, SHEN & ASSOCIATES (CN)
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