Title:
SUBSTRATE FOR THE DEPOSITION OF A DEPOSITION APPARATUS, FILM-FORMING METHOD, AND METHOD FOR MANUFACTURING AN ORGANIC ELECTROLUMINESCENCE DISPLAY DEVICE USING THE SUBSTRATE FOR DEPOSITION
Document Type and Number:
WIPO Patent Application WO/2011/005008
Kind Code:
A2
Abstract:
The present invention provides a substrate for the deposition of a deposition apparatus, a film-forming method, and a method for manufacturing an organic electroluminescence display device using the substrate for deposition, comprising: providing a substrate; forming a conductive layer for joule heating on the substrate; forming a deposition material layer on the substrate containing the conductive layer for joule heating; and applying electric fields to the conductive layer for joule heating to joule heat the deposition material layer. Consequently, the present invention has the effects of providing a film-forming method which is advantageous in manufacturing large devices.
Inventors:
RO JAE-SANG (KR)
HONG WON-EUI (KR)
HONG WON-EUI (KR)
Application Number:
PCT/KR2010/004390
Publication Date:
January 13, 2011
Filing Date:
July 06, 2010
Export Citation:
Assignee:
ENSILTECH CORP (KR)
RO JAE-SANG (KR)
HONG WON-EUI (KR)
RO JAE-SANG (KR)
HONG WON-EUI (KR)
International Classes:
C23C14/24; H01L51/56; H05B33/10
Foreign References:
| JP2002302759A | 2002-10-18 | |||
| JP2001295027A | 2001-10-26 | |||
| JP2008174783A | 2008-07-31 | |||
| KR20090015805A | 2009-02-12 |
Attorney, Agent or Firm:
CHOI, YOUNG-BOK (KR)
최영복 (KR)
최영복 (KR)
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